基于偏差塔形伪影的旋转轴几何误差辨识

Q3 Materials Science
Tao CHENG, Sitong XIANG, Hainan ZHANG, Jianguo YANG
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引用次数: 0

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本文章由计算机程序翻译,如有差异,请以英文原文为准。
Geometric error identification of rotary axes based on misaligned tower-shaped artefact
æ—‹è½¬è½´çš„å‡ ä½•è¯¯å·®ç›´æŽ¥å½±å“äº”è½´æœºåºŠçš„åŠ å·¥ç²¾åº¦ï¼Œä½†ç”±äºŽå ¶è¯¯å·®é¡¹å¤šä¸”é«˜åº¦è€¦åˆï¼Œå› æ­¤è¾¨è¯†éš¾åº¦è¾ƒå¤§ã€‚æå‡ºäº†ä¸€ç§å·¥ä»¶åˆ‡å‰Šåœ¨æœºæµ‹é‡æ–¹æ³•ï¼Œç”¨äºŽè¾¨è¯†äº”è½´æœºåºŠæ—‹è½¬è½´6é¡¹ä¸Žä½ç½®ç›¸å ³çš„å‡ ä½•è¯¯å·®ï¼ˆPDGEï¼‰ã€‚è®¾è®¡å¹¶åŠ å·¥ä¸€ç§é”™ä½å¡”å½¢å·¥ä»¶ï¼Œå®ƒç”±ä¸‰å±‚é”™ä½å åŠ çš„çŸ©å½¢å—ç»„æˆã€‚åœ¨å·¥ä»¶ä¸åŒå±‚çº§çš„åº•é¢ä¸Žä¾§é¢å¸ƒç½®æµ‹ç‚¹å¹¶è¿›è¡Œåœ¨æœºæµ‹é‡ï¼ŒåŸºäºŽç©ºé—´è¯¯å·®æ¨¡åž‹æŽ¨å¯¼å‡ºæ¯é¡¹è¯¯å·®çš„è¾¨è¯†åŽŸç†ä¸Žè§£æžè§£ï¼Œå¹¶é‡‡ç”¨è’™ç‰¹å¡æ´›æ¨¡æ‹Ÿè¿›è¡Œä¸ç¡®å®šæ€§åˆ†æžã€‚æœ€åŽï¼Œé€šè¿‡ä¸Žçƒæ†ä»ªè¯¯å·®è¾¨è¯†æ–¹æ³•è¿›è¡Œå¯¹æ¯”éªŒè¯ï¼Œçº¿æ€§è¯¯å·®EXC,EYC与EZC的辨识结果偏差最大为2.7,-1.7与-1.3 μm;角度误差EAC,EBC与ECC的辨识结果偏差最大为1.3″,-0.6″与-2.1â€³ï¼Œä¸¤è€ è¾¨è¯†å¹³å‡å»åˆåº¦è¾¾95.4%ã€‚æœ¬æ–¹æ³•é€šè¿‡å·¥ä»¶åˆ‡å‰Šä¸Žåœ¨æœºæµ‹é‡ï¼Œæ¯é¡¹è¯¯å·®çš„è¾¨è¯†åŽŸç†ä¸Žè§£æžè§£å½¢å¼ç®€å•ï¼Œå¯è¾¨è¯†å®žé™ å·¥å†µä¸‹çš„æ—‹è½¬è½´6项PDGE。
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来源期刊
Guangxue Jingmi Gongcheng/Optics and Precision Engineering
Guangxue Jingmi Gongcheng/Optics and Precision Engineering Materials Science-Electronic, Optical and Magnetic Materials
CiteScore
2.40
自引率
0.00%
发文量
95
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