腔厚和绝缘材料对生物传感用介电调制沟槽无结双栅场效应晶体管的影响

Swagata Bhattacherjee, Palasri Dhar, Sunipa Roy
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引用次数: 0

摘要

摘要:本文研究了栅极介电介质对栅极无结双栅场效应晶体管(JL-DGFET)的影响,并在考虑低频噪声的情况下,研究了JL-DGFET的纳米腔隙对不同性能指标的影响。方法:指出栅极介电介质和纳米间隙这两个参数对器件的噪声感知能力和性能有很大的影响。结果:选择合适的双栅介质材料和腔体厚度可以有效提高生物传感器的灵敏度,同时降低噪声。结论:当介电常数k = 3.57时,灵敏度可达9.5;当介电常数k = 2.1时,灵敏度可达6.5。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impacts of Cavity Thickness and Insulating Material on Dielectric Modulated Trench Junction-less Double Gate Field Effect Transistor for Biosensing Applications
Introduction: This work represents the influence of gate dielectric, and the nano-cavity gap of a dielectric modulated trench gate Junction-less Double Gate Field Effect Transistor (JL-DGFET) on the different performance indicators is investigated considering the Low-Frequency Noise. Methods:: It is noted that the gate dielectric and the nanogap, both parameters, have a substantial influence on the sensing capacity and performance of noise of the device. Results:: A double gate suitable dielectric material and cavity thickness can effectively improve the biosensor’s sensitivity with a minimum amount of noise. Conclusion:: The sensitivity is found to increase up to 9.5 for dielectric constant, k = 3.57 and 6.5 for dielectric constant, k = 2.1.
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来源期刊
Current Materials Science
Current Materials Science Materials Science-Materials Science (all)
CiteScore
0.80
自引率
0.00%
发文量
38
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