An analysis for support loss of micro-cantilever beam based on PML method

Support loss is the phenomenon where part of the vibration energy of a micro-cantilever is transferred to the support structure in the form of elastic waves and dissipated. Since the support loss is coupled with other dissipations, it is difficult for the experimental operator to analyze it experimentally. In this paper, the support loss of micro-cantilever beam is investigated using the perfectly matched layer method, and the support loss is calculated by using the two-dimensional and three-dimensional models, separately. Then we find that both models are consistent with the corresponding theoretical analysis, and the three-dimensional model is closer to the actual situation. In addition, we investigate the contribution of the thickness of the support substrate and the size of the micro-cantilever beam to the support loss. The result shows that the thicker the support substrate and the slimmer the micro-cantilever beam, the smaller the support loss.