利用高重复率飞秒激光脉冲的时空聚焦在玻璃中进行三维各向同性微加工

IF 15.3 1区 物理与天体物理 Q1 OPTICS
Yuanxin Tan, Haotian Lv, Jian Xu, Aodong Zhang, Yunpeng Song, Jianping Yu, Wei Chen, Yuexin Wan, Zhaoxiang Liu, Zhaohui Liu, Jia Qi, Yangjian Cai, Ya Cheng
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引用次数: 0

摘要

为了提高三维各向同性加工的加工效率和扩展调谐范围,我们将同步时空聚焦(SSTF)技术应用于高重复频率飞秒(fs)光纤激光系统。在SSTF方案中,我们提出了一种通过构建腔外脉冲拉伸器对窄频谱带宽光纤激光器进行脉冲补偿的方案。我们进一步展示了真正的3D各向同性微加工在光敏玻璃,可调的分辨率范围从8µm到22µm,使用s激光脉冲的SSTF。此外,我们系统地研究了脉冲能量、写入速度、加工深度和球差对加工分辨率的影响。作为概念验证,SSTF方案进一步用于激光辅助蚀刻三维均匀尺寸的复杂玻璃微流控结构。该技术可扩展到先进光子学、三维仿生打印、微机电系统、芯片实验室等领域。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses
To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher. We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8 µm to 22 µm using the SSTF of fs laser pulses. Moreover, we systematically investigate the influences of pulse energy, writing speed, processing depth, and spherical aberration on the fabrication resolution. As a proof-of-concept demonstration, the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes. The developed technique can be extended to many applications such as advanced photonics, 3D biomimetic printing, micro-electromechanical systems, and lab-on-a-chips.
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来源期刊
CiteScore
19.30
自引率
7.10%
发文量
128
期刊介绍: Opto-Electronic Advances (OEA) is a distinguished scientific journal that has made significant strides since its inception in March 2018. Here's a collated summary of its key features and accomplishments: Impact Factor and Ranking: OEA boasts an impressive Impact Factor of 14.1, which positions it within the Q1 quartiles of the Optics category. This high ranking indicates that the journal is among the top 25% of its field in terms of citation impact. Open Access and Peer Review: As an open access journal, OEA ensures that research findings are freely available to the global scientific community, promoting wider dissemination and collaboration. It upholds rigorous academic standards through a peer review process, ensuring the quality and integrity of the published research. Database Indexing: OEA's content is indexed in several prestigious databases, including the Science Citation Index (SCI), Engineering Index (EI), Scopus, Chemical Abstracts (CA), and the Index to Chinese Periodical Articles (ICI). This broad indexing facilitates easy access to the journal's articles by researchers worldwide. Scope and Purpose: OEA is committed to serving as a platform for the exchange of knowledge through the publication of high-quality empirical and theoretical research papers. It covers a wide range of topics within the broad area of optics, photonics, and optoelectronics, catering to researchers, academicians, professionals, practitioners, and students alike.
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