用于选择性氢气传感器的退火辅助SnO2薄膜

IF 0.6 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Indian Journal of Pure & Applied Physics Pub Date : 2023-01-01 DOI:10.56042/ijpap.v61i10.319

{"title":"用于选择性氢气传感器的退火辅助SnO2薄膜","authors":"","doi":"10.56042/ijpap.v61i10.319","DOIUrl":null,"url":null,"abstract":"Today, monitoring and classification of hydrogen gas by metal oxide-based sensors are widely studying to improve their selectivity and stability. In present work, hydrogen sensing properties of magnetron sputtered deposited pure SnO2 thin films have been studied. The pure SnO2 thin film was deposited on glass substrate and as-deposited film was annealed at 450 °C for 6 hrs. The annealed SnO2 thin film has crystalline tetragonal structure, granular surface morphology and non-stoichiometry elemental composition of tin and oxygen vacancies. A higher gas sensing response is obtained for annealed SnO2 thin film as compare to as-deposited SnO2 thin film.A limit of detection (LOD) ~175 ppb is estimated for annealed SnO2 thin film-based sensor. This sensor exhibits fast response and recovery time of 42 s/52 s for 50 and 500 ppm hydrogen gas, respectively. The sensor is found highly selective towards H2 gas in compare to different gases such as methane, carbon monoxide and nitrogen dioxide.","PeriodicalId":13509,"journal":{"name":"Indian Journal of Pure & Applied Physics","volume":"23 1","pages":"0"},"PeriodicalIF":0.6000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Annealing-assisted SnO2 Thin Film for Selective Hydrogen Gas Sensor\",\"authors\":\"\",\"doi\":\"10.56042/ijpap.v61i10.319\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Today, monitoring and classification of hydrogen gas by metal oxide-based sensors are widely studying to improve their selectivity and stability. In present work, hydrogen sensing properties of magnetron sputtered deposited pure SnO2 thin films have been studied. The pure SnO2 thin film was deposited on glass substrate and as-deposited film was annealed at 450 °C for 6 hrs. The annealed SnO2 thin film has crystalline tetragonal structure, granular surface morphology and non-stoichiometry elemental composition of tin and oxygen vacancies. A higher gas sensing response is obtained for annealed SnO2 thin film as compare to as-deposited SnO2 thin film.A limit of detection (LOD) ~175 ppb is estimated for annealed SnO2 thin film-based sensor. This sensor exhibits fast response and recovery time of 42 s/52 s for 50 and 500 ppm hydrogen gas, respectively. The sensor is found highly selective towards H2 gas in compare to different gases such as methane, carbon monoxide and nitrogen dioxide.\",\"PeriodicalId\":13509,\"journal\":{\"name\":\"Indian Journal of Pure & Applied Physics\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Indian Journal of Pure & Applied Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.56042/ijpap.v61i10.319\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Indian Journal of Pure & Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.56042/ijpap.v61i10.319","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

目前，利用金属氧化物传感器对氢气进行监测和分类，以提高其选择性和稳定性得到了广泛的研究。本文研究了磁控溅射沉积的纯SnO2薄膜的感氢性能。将纯SnO2薄膜沉积在玻璃衬底上，并在450℃下退火6小时。退火后的SnO2薄膜具有结晶四方结构、颗粒状表面形貌和非化学计量的锡和氧空位元素组成。退火后的SnO2薄膜比沉积后的SnO2薄膜具有更高的气敏响应。对退火SnO2薄膜传感器的检测限(LOD)估计为175 ppb。该传感器具有快速响应和恢复时间42秒/52秒，分别为50和500 ppm的氢气。与甲烷、一氧化碳和二氧化氮等其他气体相比，该传感器对H2气体具有很高的选择性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Annealing-assisted SnO2 Thin Film for Selective Hydrogen Gas Sensor

Today, monitoring and classification of hydrogen gas by metal oxide-based sensors are widely studying to improve their selectivity and stability. In present work, hydrogen sensing properties of magnetron sputtered deposited pure SnO2 thin films have been studied. The pure SnO2 thin film was deposited on glass substrate and as-deposited film was annealed at 450 °C for 6 hrs. The annealed SnO2 thin film has crystalline tetragonal structure, granular surface morphology and non-stoichiometry elemental composition of tin and oxygen vacancies. A higher gas sensing response is obtained for annealed SnO2 thin film as compare to as-deposited SnO2 thin film.A limit of detection (LOD) ~175 ppb is estimated for annealed SnO2 thin film-based sensor. This sensor exhibits fast response and recovery time of 42 s/52 s for 50 and 500 ppm hydrogen gas, respectively. The sensor is found highly selective towards H2 gas in compare to different gases such as methane, carbon monoxide and nitrogen dioxide.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Indian Journal of Pure & Applied Physics 物理-物理：综合

CiteScore

1.30

自引率

14.30%

发文量

审稿时长

7 months

期刊介绍： Started in 1963, this journal publishes Original Research Contribution as full papers, notes and reviews on classical and quantum physics, relativity and gravitation; statistical physics and thermodynamics; specific instrumentation and techniques of general use in physics, elementary particles and fields, nuclear physics, atomic and molecular physics, fundamental area of phenomenology, optics, acoustics and fluid dynamics, plasmas and electric discharges, condensed matter-structural, mechanical and thermal properties, electronic, structure, electrical, magnetic and optical properties, cross-disciplinary physics and related areas of science and technology, geophysics, astrophysics and astronomy. It also includes latest findings in the subject under News Scan.