磁控溅射TiN和VN涂层对铝电极电阻抗的影响

IF 0.3 4区综合性期刊 Q4 MULTIDISCIPLINARY SCIENCES

Comptes Rendus De L Academie Bulgare Des Sciences Pub Date : 2023-10-01 DOI:10.7546/crabs.2023.09.03

Georgi Kotlarski, Nikolay Ivanov, Dimitar Dechev, Maria Ormanova, Stefan Valkov, Valentin Mateev, Iliana Marinova

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引用次数: 0

摘要

本文采用直流磁控溅射的方法，在铝电极上涂覆TiN和VN涂层，研究保护涂层对衬底电阻抗的影响。用x射线衍射(XRD)研究了样品的结构。测定了基体和涂层样品的显微硬度。研究了有涂层和没有涂层的基板的电阻抗，并将结果用于评价涂层在柔性电子产品界面电极上的适用性。采用宽频率范围的电阻抗谱法测定了材料的层间和表面接触特性。结果表明，使用TiN和VN薄膜涂覆的电极的稳定性和电导率有所提高，特别是在低频范围内。

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Influence of Magnetron Sputtered TiN and VN Coatings on the Electrical Impedance of Aluminium Electrodes

In this work, TiN and VN coatings were applied on aluminium electrodes by direct current (DC) magnetron sputtering in order to study the influence of the protective coatings on the electrical impedance of the substrate. The structure of the samples was studied using X-ray diffraction (XRD). The microhardness of the substrate and the coated samples was also determined. The electrical impedance of the substrates with and without coatings was also studied and the results were used for evaluation of the applicability of such coatings for interface electrodes for flexible electronics. Electric impedance spectroscopy in a wide frequency range was applied for interlayer and surface contact properties determination. Results showed improved stability and conductivity of the electrodes coated using the TiN and VN thin films, particularly in the low frequency range.

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来源期刊

Comptes Rendus De L Academie Bulgare Des Sciences 综合性期刊-综合性期刊

CiteScore

0.60

自引率

33.30%

发文量

181

审稿时长

3-6 weeks

期刊介绍： Founded in 1948 by academician Georgy Nadjakov, "Comptes rendus de l’Académie bulgare des Sciences" is also known as "Доклади на БАН","Доклады Болгарской академии наук" and "Proceeding of the Bulgarian Academy of Sciences". If applicable, the name of the journal should be abbreviated as follows: C. R. Acad. Bulg. Sci. (according to ISO)