飞秒脉冲爆发硅激光烧蚀的数值模拟

IF 0.8 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Laser Micro Nanoengineering Pub Date : 2023-09-01 DOI:10.2961/jlmn.2023.02.2010

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Numerical Simulation of Silicon Laser Ablation with GHz Bursts of Femtosecond Pulses

We simulate laser ablation of silicon with GHz bursts of femtosecond laser pulses using COMSOL Multiphysics. The simple model of deformation geometry is considered to simulate laser ablation and material removal, giving a laser-induced crater after irradiation. We demonstrate that at the same burst pulse energy a deeper crater is ablated for a GHz burst for larger number of intra-pulses. Analysis of the temperature evolution of silicon target reveals that during femtosecond laser irradiation with GHz burst mode, efficient absorption of laser energy occurs due to the heat-accumulation effect. These simulated results show a good agreement with the experimental measurements and could quantitatively explain the mechanism of silicon ablation enhancement with the GHz bursts of femtosecond laser pulses.

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来源期刊

Journal of Laser Micro Nanoengineering 工程技术-材料科学：综合

CiteScore

1.90

自引率

9.10%

发文量

审稿时长

3 months

期刊介绍： Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge. JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.