快速μ m ITO电极图案激光直接写入使用一个适度的商用光纤激光划线机

IF 0.8 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Laser Micro Nanoengineering Pub Date : 2023-09-01 DOI:10.2961/jlmn.2023.02.2002

{"title":"快速μ m ITO电极图案激光直接写入使用一个适度的商用光纤激光划线机","authors":"","doi":"10.2961/jlmn.2023.02.2002","DOIUrl":null,"url":null,"abstract":"This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"311 1","pages":"0"},"PeriodicalIF":0.8000,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Rapid µm ITO Electrode Patterning by Laser-direct Writing Using a Modest Commercial Fibre Laser Scriber\",\"authors\":\"\",\"doi\":\"10.2961/jlmn.2023.02.2002\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.\",\"PeriodicalId\":54788,\"journal\":{\"name\":\"Journal of Laser Micro Nanoengineering\",\"volume\":\"311 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.8000,\"publicationDate\":\"2023-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Laser Micro Nanoengineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2961/jlmn.2023.02.2002\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Laser Micro Nanoengineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2961/jlmn.2023.02.2002","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Rapid µm ITO Electrode Patterning by Laser-direct Writing Using a Modest Commercial Fibre Laser Scriber

This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Journal of Laser Micro Nanoengineering 工程技术-材料科学：综合

CiteScore

1.90

自引率

9.10%

发文量

审稿时长

3 months

期刊介绍： Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge. JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.