夏龙 Xia Long, 王新悦 Wang Xinyue, 吴胜保 Wu Shengbao, 崔省伟 Cui Shengwei, 冯亭 Feng Ting, 姚晓天 Yao X. Steve
{"title":"基于OCDR的飞秒激光直写光波导微结构在线监测","authors":"夏龙 Xia Long, 王新悦 Wang Xinyue, 吴胜保 Wu Shengbao, 崔省伟 Cui Shengwei, 冯亭 Feng Ting, 姚晓天 Yao X. Steve","doi":"10.3788/cjl221411","DOIUrl":null,"url":null,"abstract":"飞秒激光直写技术具有无掩模、真三维、高精度等优点,在透明介质光波导器件立体加工中具有很好的应用前景。然而,实际加工中需根据目标材料的特性反复探索和优化加工参数,过程繁琐且复杂。提出了一种基于光相干域反射仪(OCDR)在线监测飞秒激光在已有波导中直写加工微结构或器件的新技术,以光纤波导为例研究了激光脉冲能量、脉冲频率及直写速率对加工结构回波反射特性的影响,并分析了反射特性与加工工艺参数的对应关系。研究结果表明:通过OCDR反射曲线突变点能够快速准确地确定引起材料性质改变的激光能量和脉冲频率的阈值条件,且根据曲线变化趋势和反射峰特点可判断材料性质改变类型;此外,通过分布式测量激光直写反射曲线,可获得加工速率对加工效果的影响规律。该技术为波导内飞秒激光直写微结构或器件工艺参数的摸索提供了一种非破坏、高效、在线的解决方案。","PeriodicalId":47922,"journal":{"name":"CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG","volume":"97 1","pages":"0"},"PeriodicalIF":1.8000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"基于OCDR的飞秒激光直写光波导微结构在线监测\",\"authors\":\"夏龙 Xia Long, 王新悦 Wang Xinyue, 吴胜保 Wu Shengbao, 崔省伟 Cui Shengwei, 冯亭 Feng Ting, 姚晓天 Yao X. Steve\",\"doi\":\"10.3788/cjl221411\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"飞秒激光直写技术具有无掩模、真三维、高精度等优点,在透明介质光波导器件立体加工中具有很好的应用前景。然而,实际加工中需根据目标材料的特性反复探索和优化加工参数,过程繁琐且复杂。提出了一种基于光相干域反射仪(OCDR)在线监测飞秒激光在已有波导中直写加工微结构或器件的新技术,以光纤波导为例研究了激光脉冲能量、脉冲频率及直写速率对加工结构回波反射特性的影响,并分析了反射特性与加工工艺参数的对应关系。研究结果表明:通过OCDR反射曲线突变点能够快速准确地确定引起材料性质改变的激光能量和脉冲频率的阈值条件,且根据曲线变化趋势和反射峰特点可判断材料性质改变类型;此外,通过分布式测量激光直写反射曲线,可获得加工速率对加工效果的影响规律。该技术为波导内飞秒激光直写微结构或器件工艺参数的摸索提供了一种非破坏、高效、在线的解决方案。\",\"PeriodicalId\":47922,\"journal\":{\"name\":\"CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG\",\"volume\":\"97 1\",\"pages\":\"0\"},\"PeriodicalIF\":1.8000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3788/cjl221411\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3788/cjl221411","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0