基于干涉的光学玻璃划痕深度测量

IF 0.9 4区物理与天体物理 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

激光与光电子学进展 Pub Date : 2023-01-01 DOI:10.3788/lop222239

程瑶 Cheng Yao, 李思毅 Li Siyi, 唐永晟 Tang Yongcheng

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引用次数: 0

摘要

划痕是光学玻璃常见的缺陷，会导致光束质量下降、光学玻璃热效应增强、抗激光损伤性能降低等，所以在加工过程中需要对其进行准确检测和表征。选取划痕深度值为70 nm的光学玻璃为检测样本，采用光干涉法通过光波加载光学玻璃划痕信息，接着对干涉条纹图像进行图像处理和边缘检测，获取划痕的实际深度值。实验证明，光干涉法测量划痕深度值为70 nm的光学玻璃时，相对误差低于1%。所提方法为光学玻璃加工过程中发现数十纳米级的划痕深度值提供了一种检测手段。

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基于干涉的光学玻璃划痕深度测量

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来源期刊

激光与光电子学进展 Multiple-

CiteScore

1.60

自引率

50.00%

发文量

18006

期刊介绍： Laser & Optoelectronics Progress, the first laser and optoelectronics journal published in China. The main columns include general, lasers and laser optics, fiber optics and optical communications, optical design and fabrication, materials, image processing, imaging systems, optical devices, remote sensing and sensors, atmospheric optics and oceanic optics, diffraction and gratings, atomic and molecular physics, detectors, thin films, ultrafast optics, etc. The journal is included in ESCI, INSPEC, Scopus, CSCD, Chinese Core Journals, Chinese Science and Technology Core Journals, and T2 level of the Classified Catalogue of High Quality Science and Technology Journals in Optical Engineering and Optical Fields, and other databases.