碳化硅陶瓷先进磨削技术综述

Yao LIU, Jiahao LI, Zhigang ZHAO, Jinzhu GUO, Guohong LI, Xijing ZHU
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引用次数: 0

摘要

碳化硅(SiC)陶瓷以其优异的性能在工业上得到了广泛的应用。磨削是使碳化硅达到理想形状、尺寸和表面质量的关键方法。磨削缺陷如凹坑和裂纹等容易导致SiC强度下降。本文综述了高速磨削、超声振动辅助磨削、激光辅助磨削和电解选矿磨削等SiC陶瓷的先进磨削技术。分析了各种先进磨削技术的特点和机床配置,并与传统磨削技术进行了比较,揭示了其优点。综述了表面完整性、材料去除机理、模拟等方面的最新研究成果,阐述了各种先进磨削技术的基本理论。最后,总结了各种先进磨削技术的创新重点和未来的研究方向。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advanced grinding technologies for silicon carbide ceramic: A review
Silicon carbide (SiC) ceramics have been widely used in industry due to their superior properties and excellent performance. Grinding is the key method to manufacture SiC to the desired shape, dimension, and surface quality. Grinding defects such as pits and cracks are easy to cause SiC strength degradation. In this paper, the advanced grinding technologies for SiC ceramics, including high-speed grinding, ultrasonic vibration-assisted grinding, laser-assisted grinding, and electrolytic in-process dressing grinding, are reviewed. The characteristics and machine tool setups of each advanced grinding technology are analyzed and compared with traditional grinding technology to reveal the advantages. The latest research on surface integrity, material removal mechanism, simulation, and other related studies are reviewed to express the fundamental theory in each advanced grinding technology. Finally, the key innovation and future research areas for all advanced grinding technologies are drawn in the conclusion.
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