机器学习在基于in2o3的半导体氧化物气体传感器中的应用,用于对环境湿度和温度变化的高性能气体识别

Dohyoung Kim, Sang Hun Kim, Jiwon Oh, Yoonmi Nam, Heesu Hwang, Jin-Ha Hwang
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引用次数: 0

摘要

自从以智能生活标准为特征的第四次工业革命出现以来,由于计算能力和通信技术的不断提高,物理和/或化学传感器在与基于云的数据管理、人工智能和大数据相关的领域获得了学术/工业兴趣。特别是,机器学习操作的传感器网络正在发展,以提供预测、规范甚至演绎分析,克服基本的描述性功能。无论传感器类型如何,即物理或化学,均质和/或非均质配置的传感器阵列都可以提供单独使用单模传感器无法实现的物理状态和化学信息。这一技术团队已经开辟了前所未有的应用,可能通过传感器网络的实施。具有半导体气体传感器阵列的电子鼻可以被认为是一个有前途的平台,可以通过机器学习在气味和气味识别中找到新的功能。氧化物半导体气体传感器具有灵敏度高、结构简单、响应速度快、可逆性好、易于集成等优点,已广泛应用于有害、爆炸性和有毒气体的检测,但由于气体与氧化物表面之间的电荷传递机理简单,往往导致气体选择性不足,阻碍了气体识别。机器学习生态系统能够解决化学传感器领域遇到的预先存在的缺陷。然而,对环境湿度和温度变化下气体识别的研究很少,大多数研究都集中在使用湿度和温度传感器补偿传感器信号上。在没有湿度传感器的情况下,机器学习在各种湿度条件下的气体识别从未实现过。5个基于半导体金属氧化物(SMO)的气体传感器以传感器阵列的形式与机器学习方法相结合,旨在检测和区分室内挥发性有机化合物(VOCs),如苯、二甲苯、甲苯、甲醛和乙醇,以对抗湿度和/或温度变化。根据气体传感器数据类型/数量、神经网络算法、传感器组合和环境因素,利用主成分分析(PCA)和基于神经网络的分类对SMO气体传感器的性能进行了评估。PCA分析表明,在温度和/或湿度干扰的气体传感环境下,VOCs的识别存在局限性。通过使用基于神经网络的算法,即人工神经网络(ann)、深度神经网络(dnn)和一维卷积神经网络(1D cnn),可以显著改善气体检测/识别。基于整个气敏/吹扫瞬态数据的神经网络算法预测优于基于部分气敏瞬态数据的深度学习辅助预测。与1D cnn相比,dnn在训练/验证/测试数据集方面更合适。湿度变化的影响比温度波动的影响更显著。在基于ml的应用中,可以利用2传感器模式组合来取代5传感器操作,而不会显著降低预测精度。即使在环境湿度和/或温度变化的情况下,基于ml的方法也能成功地识别室内VOC污染物。双传感器模式概念可作为一种适用于实际生活和工业现场的超级传感器策略。从相互作用的SMO气体传感器的角度讨论了机器学习的含义和局限性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of Machine Learning to In2O3-Based Semiconducting Oxide Gas Sensors for High-Performance Gas Discrimination Against Ambient Humidity and Temperature Variations
Since the advent of the 4 th industrial revolution characteristic of smart living standards, physical and/or chemical sensors have been gaining their academic/industrial interests in association with cloud-based data management, artificial intelligence and big data thanks to ever-increasing computing power and communication technology. In particular, machine learning-operated sensor networks are advancing to offer predictive, prescriptive, and even deductive analytics, overcoming basic descriptive functions. Regardless of the type of sensor, i.e., physical or chemical, homogeneously and/or heterogeneously configured sensor arrays can provide physical status and chemical information that have been impossible to achieve using single-mode sensors alone. This teaming of technology has opened up unprecedented applications that may be possible through sensor network implementation. Electronic nose with semiconducting gas sensors array can be regarded as a promising platform to find new functionality in the recognition of smells and odors through machine learning. Oxide semiconductor gas sensors with high sensitivity, simple structure, rapid response speed, excellent reversibility and facile integration have been widely employed to detect harmful, explosive, and toxic gases but the simple gas sensing mechanism involving charge transfer between the gas and oxide surfaces often leads to a lack of gas selectivity, hampering gas recognition. The machine learning ecosystem is capable of solving the pre-existing drawbacks encountered in chemical sensor domains. However, the recognition of gases under variations in ambient humidity and temperature has barely been investigated, and most studies have focused on the compensation of sensor signals using humidity and temperature sensor. Gas recognition under various humidity conditions by machine learning without the assistance of humidity sensors has never been achieved. Five In 2 O 3 -based semiconducting metal oxide (SMO) gas sensors were combined in the form of sensor arrays with machine learning methodologies with the aim to detecting and discriminating indoor volatile organic compounds (VOCs) such as benzene, xylene, toluene, formaldehyde, and ethanol against humidity and/or temperature variations. The SMO gas sensor performance was evaluated using principal component analysis (PCA) and neural network-based classification in terms of the gas sensor data type/amount, neural network algorithms, sensor combinations, and environmental factors. The PCA analyses revealed the limitations on the discrimination of VOCs under temperature- and/or humidity-interfered gas sensing environments. Gas detection/discrimination could be improved significantly by using neural network-based algorithms, i.e., artificial neural networks (ANNs), deep neural networks (DNNs), and 1-dimensional convolutional neural networks (1D CNNs). The neural network algorithm prediction based on the entire gas sensing/purge transient data outperforms deep learning-assisted predictions based on partial gas sensing transients. Compared to 1D CNNs, DNNs are more appropriate in terms of training/validation/test datasets. The effects due to humidity variation are proven to more significant than those due to temperature fluctuation. A 2-sensor mode combination can be exploited to replace the 5-sensor operation in ML-based applications without significantly losing the prediction accuracy. The indoor VOC pollutants can be successfully discriminated even under the variation of ambient humidity and/or temperature by ML-based approaches. The 2-sensor mode concept can be exploited as a super-sensor strategy applicable to the practical domestic and industrial sites. The implications and limitations of machine learning are discussed in terms of mutually-interacting SMO gas sensors.
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