{"title":"通过高分辨率模拟对旋转盘上显影液膜失稳点的无量纲分析","authors":"J. Won, T. Kim, J. Park, S. Kang","doi":"10.6112/kscfe.2023.28.3.018","DOIUrl":null,"url":null,"abstract":"A liquid jet developing into a liquid film over a rotating disk is found in various industrial applications such as semiconductor manufacturing processes. The liquid film develops various instabilities such as the spiral wave and film break-up. This study performs a non-dimensional analysis on these film instability points. High-fidelity flow simulations are performed for a parametric study based on the rotation rate, flow rate, liquid viscosity, surface tension, and contact angle (CA). A non-dimensional model for the instability points is derived using the Buckingham‘s PI theorem. Parameter sensitivity analyses are performed using the simulation results for a reduced model. The spiral wave starting point is affected mainly by the Reynolds number and capillary number, but not by CA. Also, a reduced non-dimensional model using a single parameter can be derived by combining the non-dimensional parameters. On the break-up point, the surface tension and CA have primary effects, and the capillary number and CA are found to be the main non-dimensional parameters. Based on this finding, a reduced non-dimensional model that predicts the break-up point is derived.","PeriodicalId":496738,"journal":{"name":"Han'gug jeonsan yuchegong haghoeji","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"NON-DIMENSIONAL ANALYSIS OF FILM INSTABILITY POINTS OF LIQUID FILM DEVELOPING OVER A ROTATING DISK VIA HIGHLY RESOLVED SIMULATIONS\",\"authors\":\"J. Won, T. Kim, J. Park, S. Kang\",\"doi\":\"10.6112/kscfe.2023.28.3.018\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A liquid jet developing into a liquid film over a rotating disk is found in various industrial applications such as semiconductor manufacturing processes. The liquid film develops various instabilities such as the spiral wave and film break-up. This study performs a non-dimensional analysis on these film instability points. High-fidelity flow simulations are performed for a parametric study based on the rotation rate, flow rate, liquid viscosity, surface tension, and contact angle (CA). A non-dimensional model for the instability points is derived using the Buckingham‘s PI theorem. Parameter sensitivity analyses are performed using the simulation results for a reduced model. The spiral wave starting point is affected mainly by the Reynolds number and capillary number, but not by CA. Also, a reduced non-dimensional model using a single parameter can be derived by combining the non-dimensional parameters. On the break-up point, the surface tension and CA have primary effects, and the capillary number and CA are found to be the main non-dimensional parameters. Based on this finding, a reduced non-dimensional model that predicts the break-up point is derived.\",\"PeriodicalId\":496738,\"journal\":{\"name\":\"Han'gug jeonsan yuchegong haghoeji\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-09-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Han'gug jeonsan yuchegong haghoeji\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.6112/kscfe.2023.28.3.018\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Han'gug jeonsan yuchegong haghoeji","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.6112/kscfe.2023.28.3.018","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
NON-DIMENSIONAL ANALYSIS OF FILM INSTABILITY POINTS OF LIQUID FILM DEVELOPING OVER A ROTATING DISK VIA HIGHLY RESOLVED SIMULATIONS
A liquid jet developing into a liquid film over a rotating disk is found in various industrial applications such as semiconductor manufacturing processes. The liquid film develops various instabilities such as the spiral wave and film break-up. This study performs a non-dimensional analysis on these film instability points. High-fidelity flow simulations are performed for a parametric study based on the rotation rate, flow rate, liquid viscosity, surface tension, and contact angle (CA). A non-dimensional model for the instability points is derived using the Buckingham‘s PI theorem. Parameter sensitivity analyses are performed using the simulation results for a reduced model. The spiral wave starting point is affected mainly by the Reynolds number and capillary number, but not by CA. Also, a reduced non-dimensional model using a single parameter can be derived by combining the non-dimensional parameters. On the break-up point, the surface tension and CA have primary effects, and the capillary number and CA are found to be the main non-dimensional parameters. Based on this finding, a reduced non-dimensional model that predicts the break-up point is derived.