晶圆处理设备中有机颗粒对硅异质结伪效率的影响

IF 1.9 Q3 PHYSICS, APPLIED
Andreas Fischer, Ioan Voicu Vulcanean, Sebastian Pingel, Anamaria Steinmetz
{"title":"晶圆处理设备中有机颗粒对硅异质结伪效率的影响","authors":"Andreas Fischer, Ioan Voicu Vulcanean, Sebastian Pingel, Anamaria Steinmetz","doi":"10.1051/epjpv/2023023","DOIUrl":null,"url":null,"abstract":"Within this paper a systematic analysis of particle transfer onto SHJ Solar cell precursors by handling with suction cups and the impact on the pseudo efficiency is presented. The study establishes a correlation between particle area coverage and a resulting loss of pseudo solar cell parameters. The analysis was carried out on one hand by means of SEM measurements at the contact points between suction cup and wafer to quantify particle transfer and on the other hand by means of suns photoluminescence imaging measurements to evaluate the resulting losses. It is shown that the choice of contact material and the wafer temperature have a significant influence on the transferred particle number, their size and the resulting particle area coverage. A local electrical defect was observed at these particle-rich spots, which also affected a larger area around this insufficiently passivated region. This had a significant negative effect on the pseudo efficiency, which is more pronounced for increasing particle area coverage. If the particle density is increased by 0.1% within an area of 800 mm 2 , the pseudo efficiency in this area decreases by almost 1.2% Relative . The correlation found can be used to predict an efficiency loss using standard photoluminescence images.","PeriodicalId":42768,"journal":{"name":"EPJ Photovoltaics","volume":"22 1","pages":"0"},"PeriodicalIF":1.9000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Impact of organic particles from wafer handling equipment on silicon heterojunction pseudo-efficiency\",\"authors\":\"Andreas Fischer, Ioan Voicu Vulcanean, Sebastian Pingel, Anamaria Steinmetz\",\"doi\":\"10.1051/epjpv/2023023\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Within this paper a systematic analysis of particle transfer onto SHJ Solar cell precursors by handling with suction cups and the impact on the pseudo efficiency is presented. The study establishes a correlation between particle area coverage and a resulting loss of pseudo solar cell parameters. The analysis was carried out on one hand by means of SEM measurements at the contact points between suction cup and wafer to quantify particle transfer and on the other hand by means of suns photoluminescence imaging measurements to evaluate the resulting losses. It is shown that the choice of contact material and the wafer temperature have a significant influence on the transferred particle number, their size and the resulting particle area coverage. A local electrical defect was observed at these particle-rich spots, which also affected a larger area around this insufficiently passivated region. This had a significant negative effect on the pseudo efficiency, which is more pronounced for increasing particle area coverage. If the particle density is increased by 0.1% within an area of 800 mm 2 , the pseudo efficiency in this area decreases by almost 1.2% Relative . The correlation found can be used to predict an efficiency loss using standard photoluminescence images.\",\"PeriodicalId\":42768,\"journal\":{\"name\":\"EPJ Photovoltaics\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EPJ Photovoltaics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1051/epjpv/2023023\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EPJ Photovoltaics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/epjpv/2023023","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0

摘要

本文系统地分析了吸盘处理对颗粒在SHJ太阳能电池前驱体上的转移及其对伪效率的影响。该研究建立了粒子面积覆盖与由此产生的伪太阳能电池参数损失之间的相关性。分析一方面通过在吸盘和晶圆之间接触点的SEM测量来量化颗粒转移,另一方面通过太阳光致发光成像测量来评估由此产生的损失。结果表明,接触材料的选择和晶圆温度对传递的颗粒数量、颗粒大小和颗粒面积覆盖率有显著影响。在这些富含粒子的点上观察到局部电缺陷,这也影响了这个未充分钝化区域周围的更大区域。这对伪效率有显著的负面影响,对颗粒面积覆盖的增加影响更为明显。在800mm2的区域内,如果颗粒密度增加0.1%,则该区域的伪效率相对降低近1.2%。发现的相关性可用于使用标准光致发光图像预测效率损失。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of organic particles from wafer handling equipment on silicon heterojunction pseudo-efficiency
Within this paper a systematic analysis of particle transfer onto SHJ Solar cell precursors by handling with suction cups and the impact on the pseudo efficiency is presented. The study establishes a correlation between particle area coverage and a resulting loss of pseudo solar cell parameters. The analysis was carried out on one hand by means of SEM measurements at the contact points between suction cup and wafer to quantify particle transfer and on the other hand by means of suns photoluminescence imaging measurements to evaluate the resulting losses. It is shown that the choice of contact material and the wafer temperature have a significant influence on the transferred particle number, their size and the resulting particle area coverage. A local electrical defect was observed at these particle-rich spots, which also affected a larger area around this insufficiently passivated region. This had a significant negative effect on the pseudo efficiency, which is more pronounced for increasing particle area coverage. If the particle density is increased by 0.1% within an area of 800 mm 2 , the pseudo efficiency in this area decreases by almost 1.2% Relative . The correlation found can be used to predict an efficiency loss using standard photoluminescence images.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
EPJ Photovoltaics
EPJ Photovoltaics PHYSICS, APPLIED-
CiteScore
2.30
自引率
4.00%
发文量
15
审稿时长
8 weeks
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信