F. Boody, J. Kempf, R. Hopfl, H. Hora, L. Laska, L. Juha, K. Rohlena, J. Krása, M. Pfeifer, F. Woryna, J. Wołowski, V. Pefina
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The Laser Ion Implantation Facility LIIF: design and first results
Summary form only given. The Laser Ion Implantation Facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions are presented.