转向磁场对阴极电弧放电中时间分辨等离子体化学的影响

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. Pub Date : 1900-01-01 DOI:10.1109/DEIV.2004.1422664

A. Ehiasarian, P.Eh. Hovscpian, R. New, J. Valter

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引用次数: 2

摘要

Hauzer ABS阴极的转向磁场对阴极电弧放电的成分和等离子体密度有很大影响。由弓形元件和前导磁场线(类似于不平衡磁控管)组成的磁场形状促进了向衬底的强离子传输。拱形磁场结构限制了阴极附近的长寿命氩等离子体，这影响了阴极点产生的金属离子的电荷状态。通过磁场结构导致离子通量降低，但离子电荷状态有所增加。研究结果表明，阴极电弧蒸发过程中的转向磁场可以有效地控制离子通量的大小和组成。

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Influence of steering magnetic field on the time resolved plasma chemistry in cathodic arc discharges

The steering magnetic field of Hauzer ABS cathodes has been shown to influence strongly the composition and plasma density of cathodic arc discharges. Magnetic field shapes comprising an arched component combined with fotwardleading field lines (similar to unbalanced magnetrons) promote a strong ion transport towards the substrates. The arched magnetic field configuration confines a long-life Ar plasma near the cathode, which influences the charge state of metal ions produced by the cathode spot. Through-field magnetic configurations lead to a decreased ion flux to the substrates but a somewhat increased ion charge state. The paper shows that the steering magnetic field in cathodic arc evaporation can be used effectively to control both the magnitude and composition of the ion flux to the substrates.

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来源期刊

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV.

CiteScore

0.40

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0.00%

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