利用离子束计算校正短空间波长误差

Lynn N. Allen
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引用次数: 0

摘要

对于大小光学元件上1 ~ 2cm量级的空间波长表面图形误差的校正,存在着相当大的兴趣。这些误差可能是由传统工艺造成的,这些工艺会导致轻型光学元件上的印刷穿透(即光学绗缝),非对称几何形状上的严重区域或卷边,或小型光学元件上的短波长误差。离子束计算是一种非常有效的低阶像差校正方法,也被用来校正这些误差。本文将介绍该功能的几个示例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Correction of Short Spatial Wavelength Errors Using Ion Beam Figuring
Considerable interest exists for correcting spatial wavelength surface figure errors on the order of 1 to 2 cm on large and small optical elements. These errors can result from conventional processes that cause print-through (i.e. optical quilting) on lightweighted optics, severe zonal or rolled edges on non-symmetric geometries, or short wavelength errors on small optics. Ion beam figuring, which is extremely efficient for correcting low-order aberrations, has also been utilized to correct these errors. Several examples of this capability will be presented.
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