C. Mauc, T. Perrier, R. Lévy, J. Moulin, P. Kayser
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Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials
This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.
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