组装超薄和柔性集成电路

C. Adler, G. Klink, M. Feil, F. Ansorge, H. Reichl
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引用次数: 10

摘要

位于慕尼黑的Fraunhofer可靠性和微集成研究所开发了一种制造厚度低至10 /spl mu/m的超薄集成电路的工艺。这些非常薄的集成电路具有几个优点,如封装高度低,灵活性和低互连地形。这些特性使它们成为集成在柔性衬底(如聚合物箔甚至纸张)中的理想候选者。这种系统的可能应用是电子标签、车票或防伪纸。对于这些系统,可以使用不同的模具粘合和电气互连方法。模具是用粘合剂粘合的。由于低地形,超薄集成电路可以通过聚合物浆料的丝网印刷或使用各向异性导电粘合剂的倒装芯片技术进行互连。本文描述了超薄集成电路和系统与柔性衬底互连的新基础。用于模具粘接的胶粘剂的精确剂量,胶粘剂的厚度约为。5微米被开发出来。找到了处理超薄柔性集成电路的解决方案。通过研究不同类型的基材(纸张、聚合物箔、电子柔性基材)、不同的粘合剂(环氧树脂、氰基丙烯酸酯)沉积方法(点胶、冲压和浸渍)和互连技术,得出了最佳的工艺流程。由于在机械和热机械应力下的可靠性,对组装测试系统的性能进行了评估和讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Assembly of ultra thin and flexible ICs
The Fraunhofer Institute for Reliability and Microintegration in Munich has developed a process for manufacturing ultra thin ICs with a thickness down to 10 /spl mu/m. These very thin ICs offer several advantages like low package height, flexibility and low topography for interconnection. These properties make them an ideal candidate for their integration in flexible substrates like polymer foil or even paper. Possible applications for such systems are electronic labels, tickets or security papers. For these systems different die bonding and electrical interconnection methods can be used. Dies are bonded by adhesive. Due to low topography ultra thin ICs can then be interconnected just by screen printing of polymer paste or by using the flip chip technique with anisotropic conductive adhesive. The paper describes new fundamentals for interconnection of ultra thin ICs and systems to flexible substrates. Accurate dosing of adhesive for die bonding with a thickness of adhesive of approx. 5 micron was developed. Solutions for handling of ultra thin and flexible ICs was found. An optimal process flow was developed by investigations at different types of substrates (paper, polymer foil, electronic flex substrates), different adhesives (epoxy, cyanacrylates) deposition methods (dispensing, stamping and dipping) and interconnection techniques. The properties of the assembled test systems, in due to reliability under mechanical and thermo mechanical stresses have been evaluated and are discussed.
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