Jianwei Gong, Weifeng Fei, Zheng Xia, Quanfang Chen, S. Seal, L. Chow
{"title":"电子鼻用微机械纳米晶介孔SnO/ sub2 /气体传感器的研制","authors":"Jianwei Gong, Weifeng Fei, Zheng Xia, Quanfang Chen, S. Seal, L. Chow","doi":"10.1109/ICSENS.2003.1278911","DOIUrl":null,"url":null,"abstract":"MEMS based sol gel synthesized mesoporous nanocrystalline SnO/sub 2/ gas sensor has been developed. The SnO/sub 2/ nano film is fabricated with the combination of polymeric sol gel chemistry with block copolymers used as structure directing agents. The novel hydrogen sensor has a fast response time (1s) and quick recovery time (3s), as well as good sensitivity (up to 90), comparing to other hydrogen sensors developed. The working temperature of the new sensor can be reduced as low as 100/spl deg/C. The low working temperature poses advantages such as lower power consumption; lower thermal induced signal shift as well as safe detection in certain environments where temperature is strictly limited. The developed sensor cell will be used to develop a high sensitivity and high selectivity electronic nose for harmful gas detection by combining different catalysts doped SnO/sub 2/ gas sensor array with fuzzy neural network.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Development of micromachined nanocrystalline mesoporous SnO/sub 2/ gas sensor for electronic nose\",\"authors\":\"Jianwei Gong, Weifeng Fei, Zheng Xia, Quanfang Chen, S. Seal, L. Chow\",\"doi\":\"10.1109/ICSENS.2003.1278911\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS based sol gel synthesized mesoporous nanocrystalline SnO/sub 2/ gas sensor has been developed. The SnO/sub 2/ nano film is fabricated with the combination of polymeric sol gel chemistry with block copolymers used as structure directing agents. The novel hydrogen sensor has a fast response time (1s) and quick recovery time (3s), as well as good sensitivity (up to 90), comparing to other hydrogen sensors developed. The working temperature of the new sensor can be reduced as low as 100/spl deg/C. The low working temperature poses advantages such as lower power consumption; lower thermal induced signal shift as well as safe detection in certain environments where temperature is strictly limited. The developed sensor cell will be used to develop a high sensitivity and high selectivity electronic nose for harmful gas detection by combining different catalysts doped SnO/sub 2/ gas sensor array with fuzzy neural network.\",\"PeriodicalId\":369277,\"journal\":{\"name\":\"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2003.1278911\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2003.1278911","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of micromachined nanocrystalline mesoporous SnO/sub 2/ gas sensor for electronic nose
MEMS based sol gel synthesized mesoporous nanocrystalline SnO/sub 2/ gas sensor has been developed. The SnO/sub 2/ nano film is fabricated with the combination of polymeric sol gel chemistry with block copolymers used as structure directing agents. The novel hydrogen sensor has a fast response time (1s) and quick recovery time (3s), as well as good sensitivity (up to 90), comparing to other hydrogen sensors developed. The working temperature of the new sensor can be reduced as low as 100/spl deg/C. The low working temperature poses advantages such as lower power consumption; lower thermal induced signal shift as well as safe detection in certain environments where temperature is strictly limited. The developed sensor cell will be used to develop a high sensitivity and high selectivity electronic nose for harmful gas detection by combining different catalysts doped SnO/sub 2/ gas sensor array with fuzzy neural network.
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