玻璃上光波导的制备技术

2007 Siberian Conference on Control and Communications Pub Date : 2000-09-26 DOI:10.1109/APEIE.2000.913081

A. S. Surzev, S. S. Shmakov, A. S. Akreslina, L. Orlikov

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引用次数: 0

摘要

研究了玻璃上光电元件替代晶体上光电元件的制造技术。在标准的热真空溅射设备上形成氧化铅薄膜，并在常压下进行扩散，从而获得波导。

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Fabrication Technology of Optical Waveguides on Glasses

Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals is considered. Waveguide is received by formation the film of lead oxide on standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.

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来源期刊

2007 Siberian Conference on Control and Communications

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