在晶圆厂中使用排队曲线近似来确定生产率的改进

L. Sattler
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引用次数: 34

摘要

在相同的设备下,晶圆厂面临着生产更多产量的巨大压力。但是,如果增加吞吐量而不提高生产率,则周期时间自然会增加。德州仪器公司(Texas Instruments Incorporated)正在使用排队曲线近似值来确定特定机器组的生产率随着时间的推移而提高,而不考虑晶圆厂负载。通过测量机组的月平均产量和周期时间,晶圆厂可以确定是否取得了真正的改进,也可以确定随着负载的增加或减少多少周期时间。为了在晶圆厂广泛使用,特定的配方应该相对简单和易于使用。我们将讨论排队曲线近似以及如何在fab中使用它。我们还将讨论其在理想条件下和数据不足和/或粗略近似条件下的准确性。其他制定问题,如机器或批次专用(每台机器一个队列与所有机器一个队列),各种到达/服务时间分布和百分比改进确定也得到了解决。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Using queueing curve approximations in a fab to determine productivity improvements
Fabs are under great pressure to produce more output with the same equipment set. However, if throughput is increased without productivity improvements, cycle time will naturally rise. Texas Instruments Incorporated is using a queueing curve approximation in order to determine a particular machine set's productivity improvements over time regardless of fab loadings. By measuring the machine set's monthly average throughput and cycle time, a fab can determine if true improvements have been made and also determine how much cycle time would increase or decrease with loadings. In order to have widespread use in fabs, a particular formula should be relatively simple and easy to use. We will discuss a queueing curve approximation and how it can be used in the fabs. We will also discuss its accuracy both under ideal conditions and conditions of data that are insufficient and/or rough approximations. Other formulation problems such as machine or lot dedication (one queue per machine versus one queue to all machines), various arrival/service time distributions and percentage improvement determination are also addressed.
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