激光干涉仪非线性补偿的自适应TLS方法

2008 Second International Conference on Future Generation Communication and Networking Symposia Pub Date : 2008-12-13 DOI:10.1109/FGCNS.2008.127

Sangchul Lee, G. Heo, K. You

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引用次数: 4

摘要

外差激光干涉仪在直线位移和精密测量领域有着广泛的应用。然而，不完全激光源和非理想光学元件引起的周期性非线性限制了在纳米水平上的精确测量。本文介绍了一种求解非线性最优补偿参数的总最小二乘(TLS)算法。采用TLS算法，减小了非线性误差，使测量数据更加稳定。通过与电容位移传感器测量结果的对比，验证了TLS方法的有效性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Adaptive TLS Approach for Nonlinearity Compensation in Laser Interferometer

The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and nonideal optical components restricts the precise measurement at the nano-meter level. In this paper, the total least squares (TLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the TLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of TLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.

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来源期刊

2008 Second International Conference on Future Generation Communication and Networking Symposia

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