光纤内窥镜光电调制MEMS光扫描仪

C. Chong, K. Isamoto, M. Nakada, H. Fujita, H. Toshiyoshi
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引用次数: 0

摘要

我们开发了一种新的SiP(封装系统)式光纤内窥镜光学MEMS(微机电系统)组件,无需外部电源即可运行。内窥镜传感器头(外径5mm)连接在光纤末端,利用波长为1.3微米的红外探头光,用于胃肠道检查或血管静脉监测等体内医学诊断。在相同的光学器件中,以WDM(波分复用)方式使用另一种波长为1.5微米的红外光,通过配置光伏电池在封装中产生驱动电压(高达5 V)。本文介绍了光学驱动系统的结构、扫描仪的设计与制作。MEMS扫描仪的调制演示使用光调制,通过它可以避免触电或电磁干扰的风险
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Photovoltaically Modulated MEMS Optical Scanner for Fiber Endoscope
We have developed a new SiP (system in package) style optical MEMS (microelectromechanical system) component for fiber optic endoscope that operates without using external power supply. The endoscope sensor head (5 mm in outer diameter) attached at the end of an optical fiber is designed for the use of in vivo medical diagnosis such as gastrointestinal tact or vascular vein monitor by using an infrared probe light at a 1.3-micron-wavelength. Another infrared light of at a 1.5-micron-wavelength is used in the identical optics in a WDM (wavelength division multiplex) manner to generate the drive voltage (of up to 5 V) in the package by using a collocated photovoltaic cell. This paper describes the architecture of the optical actuation system, the scanner design and fabrication. Modulation of the MEMS scanner is demonstrated using the optical modulation, by which the risk of electrocution or electromagnetic interference is avoided
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