{"title":"基于标准0.18pm 1P6M CMOS技术的解耦结构陀螺仪集成读出电路","authors":"Chun-Lin Chien, K. Wen","doi":"10.1109/ISOCC.2016.7799718","DOIUrl":null,"url":null,"abstract":"A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) is used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9×1.7mm2.","PeriodicalId":278207,"journal":{"name":"2016 International SoC Design Conference (ISOCC)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A decouple structured gyroscope with integrated readout circuit on standard 0.18pm 1P6M CMOS technology\",\"authors\":\"Chun-Lin Chien, K. Wen\",\"doi\":\"10.1109/ISOCC.2016.7799718\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) is used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9×1.7mm2.\",\"PeriodicalId\":278207,\"journal\":{\"name\":\"2016 International SoC Design Conference (ISOCC)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 International SoC Design Conference (ISOCC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISOCC.2016.7799718\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International SoC Design Conference (ISOCC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISOCC.2016.7799718","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A decouple structured gyroscope with integrated readout circuit on standard 0.18pm 1P6M CMOS technology
A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) is used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9×1.7mm2.
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