用波前匹配方法制备超小型硅波导透镜

2019 IEEE 16th International Conference on Group IV Photonics (GFP) Pub Date : 2019-08-01 DOI:10.1109/GROUP4.2019.8926098

Y. Sawada, T. Fujisawa, K. Saitoh

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引用次数: 0

摘要

采用标准的CMOS工艺，采用波前匹配(WFM)方法设计并制造了超小型硅波导透镜。实验证明，利用WFM方法设计的波导透镜可以实现几微米的低损耗自由空间光传输。

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Fabrication of Ultrasmall Silicon Waveguide Lenses Designed by Wavefront-Matching Method

We design and fabricate ultrasmall silicon waveguide lenses designed by a wavefront-matching (WFM) method by a standard CMOS process. It is experimentally demonstrated that a low-loss several micron free-space light propagation is possible by using the waveguide lens designed by the WFM method.

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2019 IEEE 16th International Conference on Group IV Photonics (GFP)

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