应力诱发泄漏电流依赖于氧化物厚度、工艺和应力水平

{"title":"应力诱发泄漏电流依赖于氧化物厚度、工艺和应力水平","authors":"A. Scarpa, P. Ries, G. Ghibaudo, A. Paccagnella, G. Pananakakis, J. Brini, G. Ghidini, C. Papadas","doi":"10.1109/ESSDERC.1997.194498","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":424167,"journal":{"name":"27th European Solid-State Device Research Conference","volume":"51 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"Stress induced leakage current dependence on oxide thickness, technology and stress level\",\"authors\":\"A. Scarpa, P. Ries, G. Ghibaudo, A. Paccagnella, G. Pananakakis, J. Brini, G. Ghidini, C. Papadas\",\"doi\":\"10.1109/ESSDERC.1997.194498\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":424167,\"journal\":{\"name\":\"27th European Solid-State Device Research Conference\",\"volume\":\"51 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-09-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"27th European Solid-State Device Research Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSDERC.1997.194498\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"27th European Solid-State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.1997.194498","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}