{"title":"采用位移放大机构驱动的柔性扫描微镜","authors":"Tzung-Ming Chen, F. Schneider, U. Wallrabe","doi":"10.1109/OMEMS.2010.5672150","DOIUrl":null,"url":null,"abstract":"We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Compliant scanning micromirror actuated with a displacement amplification mechanism\",\"authors\":\"Tzung-Ming Chen, F. Schneider, U. Wallrabe\",\"doi\":\"10.1109/OMEMS.2010.5672150\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672150\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672150","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Compliant scanning micromirror actuated with a displacement amplification mechanism
We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.
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