{"title":"热纳米压印技术制备低损耗硫系玻璃波导","authors":"T. Han, S. Madden, D. Bulla, B. Luther-Davies","doi":"10.1109/COMMAD.2010.5699775","DOIUrl":null,"url":null,"abstract":"We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2–4µm wide and 1µm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.","PeriodicalId":129653,"journal":{"name":"2010 Conference on Optoelectronic and Microelectronic Materials and Devices","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography\",\"authors\":\"T. Han, S. Madden, D. Bulla, B. Luther-Davies\",\"doi\":\"10.1109/COMMAD.2010.5699775\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2–4µm wide and 1µm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.\",\"PeriodicalId\":129653,\"journal\":{\"name\":\"2010 Conference on Optoelectronic and Microelectronic Materials and Devices\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 Conference on Optoelectronic and Microelectronic Materials and Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.2010.5699775\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 Conference on Optoelectronic and Microelectronic Materials and Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2010.5699775","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography
We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2–4µm wide and 1µm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.
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