稳定,可靠的接触到w波段Gunn二极管

M. O'Keefe, R. Miles
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引用次数: 0

摘要

在工作过程中长时间保持高温,特别是由于施加偏置而存在电场的情况下,已经发现会降低性能并导致设备故障。故障是由于接触成分迁移到Gunn二极管的有源区域。研究了涉及Au、Ge、Ni、Pt、W和Ti的接触系统在阳极和阴极金属化中的应用。结果表明,欧姆和限流触点都需要稳定的屏障金属化,以将接触半导体的触点与任何覆盖的金属化或镀金区域分开。Au迁移被确定为设备故障的主要原因。在制备过程中采用了快速退火Pt/Ti势垒金属化。这种组合在加速温度测试中表现出优异的稳定性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Stable, reliable contacts to W-band Gunn diodes
Elevated temperatures maintained for long periods during operation, especially in the presence of an electric field due to applied bias, have been found to degrade performance and result in device failure. The failures are attributed to contact constituents migrating into the active region of the Gunn diode. Contact systems involving Au, Ge, Ni, Pt, W, and Ti were investigated for both anode and cathode metallizations. Results showed that both ohmic and current limiting contacts require a stable barrier metallization to separate the contact touching the semiconductor from any overlying metallizations or Au-plated regions. Au migration was identified as a major cause of device failure. A rapidly annealed Pt/Ti barrier metallization was utilized in the fabrication process. This combination showed excellent stability during accelerated temperature testing.<>
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