Effect analysis of relative humidity on non-contacted Electrostatic Discharge

Electrostatic Discharge (ESD) parameters of breakdown voltage, current, electric field, magnetic field, arc length, rise slope, shown distinctive variation because of effect from environment multiple factors of gas pressure, electrode speed to the target, temperature, humidity, type of gas. Measurement results have obviously low repeatability in non-contacted electrostatic discharge due to effect of surrounding multiple factors. Investigation of ESD parameter low repeatability were performed with methods of theory and experiment because of its much important theory and practice significance to understand ESD properties and to protect electronic systems from ESD harm. Discharge peak values variation caused by relative humidity were described and discussed. Analysis was given on possible mechanism of low repeatability of ESD parameters.