{"title":"一种低损耗分布2位w带MEMS移相器","authors":"Juo-Jung Hung, L. Dussopt, Gabriel M. Rebeiz","doi":"10.1109/EUMA.2003.341128","DOIUrl":null,"url":null,"abstract":"A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 ¿m glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (Metal-Air-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.","PeriodicalId":156210,"journal":{"name":"2003 33rd European Microwave Conference, 2003","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"26","resultStr":"{\"title\":\"A Low-Loss Distributed 2-Bit W-Band MEMS Phase Shifter\",\"authors\":\"Juo-Jung Hung, L. Dussopt, Gabriel M. Rebeiz\",\"doi\":\"10.1109/EUMA.2003.341128\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 ¿m glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (Metal-Air-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.\",\"PeriodicalId\":156210,\"journal\":{\"name\":\"2003 33rd European Microwave Conference, 2003\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"26\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2003 33rd European Microwave Conference, 2003\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EUMA.2003.341128\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2003 33rd European Microwave Conference, 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EUMA.2003.341128","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Low-Loss Distributed 2-Bit W-Band MEMS Phase Shifter
A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 ¿m glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (Metal-Air-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.
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