Study on Vacuum Leak Calibration Technology Based on Static Cumulative Comparison Method

In order to solve the problem of accurate calibration of vacuum leaks with very small leak rate (less than 10−10 Pam3 / s), a calibration method based on the static cumulative comparison method is proposed. The method mainly uses a quadrupole mass spectrometer to compare ion current rise rates from standard gas flow meter and vacuum leak during static accumulation, and then the calibration on vacuum leak is achieved. In this paper, the calibration method based on static cumulative comparison is introduced, which includes apparatus principle, calibration process, calibration result processing and so on, and the factors of reducing the measurement uncertainty of calibration result are put forward.