{"title":"电子束切割技术的电子应用","authors":"F. Schollhammer","doi":"10.1109/TPEP.1963.1136395","DOIUrl":null,"url":null,"abstract":"The advantages of electron beam cutting are outlined. Specific production applications of these cutting techniques to electronic packaging are discussed in detail. Examples presented include: the etching of micro components; the scribing of thin films; the drilling and cutting of precision holes and slots in ceramic components; and the use of the electron beam cutter as a salvage tool.","PeriodicalId":313371,"journal":{"name":"IEEE Transactions on Product Engineering and Production","volume":"30 18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1963-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Electron Beam Cutting Techniques for Electronic Applications\",\"authors\":\"F. Schollhammer\",\"doi\":\"10.1109/TPEP.1963.1136395\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The advantages of electron beam cutting are outlined. Specific production applications of these cutting techniques to electronic packaging are discussed in detail. Examples presented include: the etching of micro components; the scribing of thin films; the drilling and cutting of precision holes and slots in ceramic components; and the use of the electron beam cutter as a salvage tool.\",\"PeriodicalId\":313371,\"journal\":{\"name\":\"IEEE Transactions on Product Engineering and Production\",\"volume\":\"30 18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1963-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Product Engineering and Production\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TPEP.1963.1136395\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Product Engineering and Production","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TPEP.1963.1136395","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electron Beam Cutting Techniques for Electronic Applications
The advantages of electron beam cutting are outlined. Specific production applications of these cutting techniques to electronic packaging are discussed in detail. Examples presented include: the etching of micro components; the scribing of thin films; the drilling and cutting of precision holes and slots in ceramic components; and the use of the electron beam cutter as a salvage tool.
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