真空电弧液滴的等离子体过滤

Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041) Pub Date : 2000-09-18 DOI:10.1109/DEIV.2000.879058

P. Shanin, N. Koval, A. V. Kozirev, I. Goncharenko, J. Langner, S. Grigoriev

{"title":"真空电弧液滴的等离子体过滤","authors":"P. Shanin, N. Koval, A. V. Kozirev, I. Goncharenko, J. Langner, S. Grigoriev","doi":"10.1109/DEIV.2000.879058","DOIUrl":null,"url":null,"abstract":"Theoretical and experimental studies have been performed on the effect of the gas-discharge plasma on the vacuum arc droplet fraction arriving at the sample in plasma-assisted deposition of TiN coatings. It has been shown that the number of droplets on a negatively biased sample decreases four or five times if the droplet flow passes through the plasma of a low-pressure nonself-sustained arc discharge having a higher electron temperature than the plasma of the vacuum arc. Possible mechanisms for the observed plasma filtration of the droplet fraction of a vacuum arc are discussed.","PeriodicalId":429452,"journal":{"name":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Plasma filtration of vacuum arc droplets\",\"authors\":\"P. Shanin, N. Koval, A. V. Kozirev, I. Goncharenko, J. Langner, S. Grigoriev\",\"doi\":\"10.1109/DEIV.2000.879058\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Theoretical and experimental studies have been performed on the effect of the gas-discharge plasma on the vacuum arc droplet fraction arriving at the sample in plasma-assisted deposition of TiN coatings. It has been shown that the number of droplets on a negatively biased sample decreases four or five times if the droplet flow passes through the plasma of a low-pressure nonself-sustained arc discharge having a higher electron temperature than the plasma of the vacuum arc. Possible mechanisms for the observed plasma filtration of the droplet fraction of a vacuum arc are discussed.\",\"PeriodicalId\":429452,\"journal\":{\"name\":\"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DEIV.2000.879058\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DEIV.2000.879058","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

对等离子体辅助沉积TiN涂层中气体放电等离子体对到达样品的真空弧滴分数的影响进行了理论和实验研究。结果表明，当液滴流通过电子温度比真空电弧等离子体高的低压非自持续电弧放电等离子体时，负偏置样品上的液滴数量会减少四到五倍。讨论了观察到的等离子体过滤真空电弧液滴部分的可能机制。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Plasma filtration of vacuum arc droplets

Theoretical and experimental studies have been performed on the effect of the gas-discharge plasma on the vacuum arc droplet fraction arriving at the sample in plasma-assisted deposition of TiN coatings. It has been shown that the number of droplets on a negatively biased sample decreases four or five times if the droplet flow passes through the plasma of a low-pressure nonself-sustained arc discharge having a higher electron temperature than the plasma of the vacuum arc. Possible mechanisms for the observed plasma filtration of the droplet fraction of a vacuum arc are discussed.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)

自引率

0.00%

发文量