40-170 GHz层压玻璃板垂直无过孔互连的演示与比较

Lakshmi Narasimha Vijay Kumar, K. Moon, Madhavan Swaminathan, Kimiyuki Kanno, Hirokazu Ito, Taku Ogawa, Koichi Hasegawa
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引用次数: 0

摘要

无过孔互连是一种有趣的解决方案,用于跨中介器核心垂直通信,而不是通过封装过孔进行通信。这些互连可以潜在地降低中间层制造的成本和复杂性。在本文中,我们讨论并比较了使用两种具有相同堆叠的不同介电材料的玻璃无线互连性能:其中一种介电材料是干膜,Ajinomoto堆积膜(ABF) GL102,另一种是JSR公司的低损耗光成像液体介电材料。频率范围为40-170 GHz。堆叠层由AGC公司的100 μm EN-A1玻璃组成,玻璃两侧各有15 μm所述介电体。本文描述了从顶层到底层的对中偏移量对互连性能的影响。与减法蚀刻和印刷技术相比,我们使用半添加工艺(SAP)来形成高精度的再分配层(RDL)。由于探针垫存在于玻璃面板的两侧,我们使用L-2L去嵌入技术来提取单个无过孔互连的特征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Demonstration and Comparison of Vertical Via-less Interconnects in Laminated Glass Panels from 40-170 GHz
Via-less interconnects are an interesting solution for communicating vertically across the interposer core instead of using through package vias. These interconnects could potentially reduce the cost and complexity of the fabrication of the inter-poser. In this paper, we discuss and compare the performance of wireless interconnects in glass using two different dielectric materials with the same stack-up: where one of the dielectrics is a dry film, Ajinomoto Build-up Film (ABF) GL102 and the other is a low-loss photo-imageable liquid dielectric material from JSR Corp. over a frequency range from 40-170 GHz. The stack-up is made up of 100 μm of glass (EN-A1) from AGC Inc. with 15 μm of the said dielectrics on either side of the glass. The paper characterizes the performance of the interconnects with an alignment offset from the top to the bottom layer. We use semi additive process (SAP) to form high precision redistribution layers (RDL), as compared to subtractive etching and printing techniques. As the probe pads are present on either side of the glass panel, we use L-2L de-embedding technique to extract the characteristics of a single via-less interconnect.
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