{"title":"基于M(O) ems的集成微干涉测量系统","authors":"J. Krężel, L. Salbut, M. Kujawińska","doi":"10.1117/12.721029","DOIUrl":null,"url":null,"abstract":"In the paper idea of integrated waveguide micro-interferometric system is presented. Results of numerical simulation of beam propagation (geometrical and wave depiction) in the measurement interferometric module is presented. Article also briefly presents laboratory setups, which are used to model the interferometers.","PeriodicalId":405495,"journal":{"name":"Optoelectronic and Electronic Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"M(O)EMS-based integrated micro-interferometric system\",\"authors\":\"J. Krężel, L. Salbut, M. Kujawińska\",\"doi\":\"10.1117/12.721029\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the paper idea of integrated waveguide micro-interferometric system is presented. Results of numerical simulation of beam propagation (geometrical and wave depiction) in the measurement interferometric module is presented. Article also briefly presents laboratory setups, which are used to model the interferometers.\",\"PeriodicalId\":405495,\"journal\":{\"name\":\"Optoelectronic and Electronic Sensors\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optoelectronic and Electronic Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.721029\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optoelectronic and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.721029","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
M(O)EMS-based integrated micro-interferometric system
In the paper idea of integrated waveguide micro-interferometric system is presented. Results of numerical simulation of beam propagation (geometrical and wave depiction) in the measurement interferometric module is presented. Article also briefly presents laboratory setups, which are used to model the interferometers.