Cu衬底对FeCoSiO薄膜高频磁性能的影响

2015 IEEE Magnetics Conference (INTERMAG) Pub Date : 2015-06-01 DOI:10.1109/INTMAG.2015.7156980

G. Lu, X. Miao, W. Cheng, X. Huang, L. Yang, L. Pan

{"title":"Cu衬底对FeCoSiO薄膜高频磁性能的影响","authors":"G. Lu, X. Miao, W. Cheng, X. Huang, L. Yang, L. Pan","doi":"10.1109/INTMAG.2015.7156980","DOIUrl":null,"url":null,"abstract":"A series of soft magnetic FeCoSiO films were fabricated on Si (100) substrates using Cu as underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of as-sputtered FeCoSiO thin films were studied in details.","PeriodicalId":381832,"journal":{"name":"2015 IEEE Magnetics Conference (INTERMAG)","volume":"170 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Influence of Cu underlayer on the high-frequency magnetic properties of FeCoSiO thin films\",\"authors\":\"G. Lu, X. Miao, W. Cheng, X. Huang, L. Yang, L. Pan\",\"doi\":\"10.1109/INTMAG.2015.7156980\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A series of soft magnetic FeCoSiO films were fabricated on Si (100) substrates using Cu as underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of as-sputtered FeCoSiO thin films were studied in details.\",\"PeriodicalId\":381832,\"journal\":{\"name\":\"2015 IEEE Magnetics Conference (INTERMAG)\",\"volume\":\"170 4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE Magnetics Conference (INTERMAG)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTMAG.2015.7156980\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Magnetics Conference (INTERMAG)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.2015.7156980","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

采用射频磁控溅射技术，以Cu为衬底，在Si(100)衬底上制备了一系列软磁FeCoSiO薄膜。研究了Cu衬底对溅射FeCoSiO薄膜动态磁性能的影响。

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Influence of Cu underlayer on the high-frequency magnetic properties of FeCoSiO thin films

A series of soft magnetic FeCoSiO films were fabricated on Si (100) substrates using Cu as underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of as-sputtered FeCoSiO thin films were studied in details.

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2015 IEEE Magnetics Conference (INTERMAG)

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