F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, D. Ristau
{"title":"小型化薄膜滤光片生产中的高分辨率光宽带监测","authors":"F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, D. Ristau","doi":"10.1364/OIC.2019.WA.7","DOIUrl":null,"url":null,"abstract":"To increase the accuracy of layer thicknesses in the production of miniaturized thin-film filters controlled by optical broadband monitoring, a high-resolution monitoring system was developed and evaluated by coating simulations and experiments.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters\",\"authors\":\"F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, D. Ristau\",\"doi\":\"10.1364/OIC.2019.WA.7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"To increase the accuracy of layer thicknesses in the production of miniaturized thin-film filters controlled by optical broadband monitoring, a high-resolution monitoring system was developed and evaluated by coating simulations and experiments.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"25 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.WA.7\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.WA.7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters
To increase the accuracy of layer thicknesses in the production of miniaturized thin-film filters controlled by optical broadband monitoring, a high-resolution monitoring system was developed and evaluated by coating simulations and experiments.
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