用于PMS(多边形镜扫描)的高效率400 dpi AlGaAs LED阵列制造

Proceedings of 5th Asian Symposium on Information Display. ASID '99 (IEEE Cat. No.99EX291) Pub Date : 1900-01-01 DOI:10.1109/ASID.1999.762735

In Hoe Kim, K. Park, Hyun-Chan Moon

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摘要

PMS由LED阵列、透镜、多边形镜和电机组成。PMS的光源是线性LED阵列。我们使用GaAs/AlGaAs (Al/spl sim/0.65)单异质结结构制作了400 dpi的LED阵列。AlGaAs LED阵列的问题就是其中之一。因此，我们通过RIE和湿法蚀刻进行了分离。RIE实验在室温下进行，并在各种蚀刻条件下使用混合气体。分别用AuGe/Ni/Au和AuZn/Pd/Au进行n ω接触和p ω接触。AlGaAs LED阵列具有低正向导通电压和高亮度等优点。

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High efficiency 400 dpi AlGaAs LED array fabrication for PMS (polygon mirror scanning)

A PMS consists of LED array, lens, polygon-mirror, and motor. A PMS's light sources is the linear LED array. We have fabricated a 400 dpi LED array using GaAs/AlGaAs (Al/spl sim/0.65) single heterojunction structure. Problems of AlGaAs LED arrays are among the emitters. Thus, we have performed isolation by RIE and wet etching. RIE experiments were carried out at room temperature and used a mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness.

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Proceedings of 5th Asian Symposium on Information Display. ASID '99 (IEEE Cat. No.99EX291)

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