x射线步进机XS-1光刻性能评价

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) Pub Date : 1998-07-13 DOI:10.1109/IMNC.1998.729924

T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii, S. Sugihara, K. Yamaguchi, Y. Kikuchi, S. Tsuboi, H. Aoyama, N. Nakayama, K. Marumoto, M. Yamabe, K. Suzuki, Y. Gomei, T. Hisatsugu, M. Fukuda, M. Suzuki, T. Haga, S. Itabashi, H. Morita

{"title":"x射线步进机XS-1光刻性能评价","authors":"T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii, S. Sugihara, K. Yamaguchi, Y. Kikuchi, S. Tsuboi, H. Aoyama, N. Nakayama, K. Marumoto, M. Yamabe, K. Suzuki, Y. Gomei, T. Hisatsugu, M. Fukuda, M. Suzuki, T. Haga, S. Itabashi, H. Morita","doi":"10.1109/IMNC.1998.729924","DOIUrl":null,"url":null,"abstract":"T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii, S. Sugihara, K. Yamaguchi, Y. Kikuchi, S. Tsuboi, H. Aoyama, N. Nakayama, K. Marumoto, M. Yamabe, K. Suzdci, Y. Gomei and T. Hisatsugu Association of Super-Advanced Electronics Technologies (ASET) c/o NTT System Electronics Laboratories, 3-1 Morinosato Wakamiya, Atsugi 243-01 98, Japan M. Fukuda, M. Suzuki, T. Haga, S . Itabashi and H. Morita NTT System Electronics Laboratories, 31 Morinosato Wakamiya, Atsugi 243-01 98, Japan","PeriodicalId":356908,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Evaluation Of Lithographic Performance Of X-Ray Stepper XS-1\",\"authors\":\"T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii, S. Sugihara, K. Yamaguchi, Y. Kikuchi, S. Tsuboi, H. Aoyama, N. Nakayama, K. Marumoto, M. Yamabe, K. Suzuki, Y. Gomei, T. Hisatsugu, M. Fukuda, M. Suzuki, T. Haga, S. Itabashi, H. Morita\",\"doi\":\"10.1109/IMNC.1998.729924\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii, S. Sugihara, K. Yamaguchi, Y. Kikuchi, S. Tsuboi, H. Aoyama, N. Nakayama, K. Marumoto, M. Yamabe, K. Suzdci, Y. Gomei and T. Hisatsugu Association of Super-Advanced Electronics Technologies (ASET) c/o NTT System Electronics Laboratories, 3-1 Morinosato Wakamiya, Atsugi 243-01 98, Japan M. Fukuda, M. Suzuki, T. Haga, S . Itabashi and H. Morita NTT System Electronics Laboratories, 31 Morinosato Wakamiya, Atsugi 243-01 98, Japan\",\"PeriodicalId\":356908,\"journal\":{\"name\":\"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-07-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.1998.729924\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1998.729924","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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摘要

T Y三井,田口,S。田中,藤井,S K。Sugihara山口,K。Y。菊池,S Tsuboi), H .青山K, N .中山昭Marumoto Yamabe, K, M。Suzdci Gomei和T, Y。Hisatsugu协会Super-Advanced电子科技(资产)c / o大本营,3 - 1系统电子实验室,Morinosato Wakamiya武器243-01 98,日本福田,M M。铃木Haga, S, T。Itabashi和H. Morita系统电子实验室，31 Morinosato Wakamiya, Atsugi 243-01，日本

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Evaluation Of Lithographic Performance Of X-Ray Stepper XS-1

T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii, S. Sugihara, K. Yamaguchi, Y. Kikuchi, S. Tsuboi, H. Aoyama, N. Nakayama, K. Marumoto, M. Yamabe, K. Suzdci, Y. Gomei and T. Hisatsugu Association of Super-Advanced Electronics Technologies (ASET) c/o NTT System Electronics Laboratories, 3-1 Morinosato Wakamiya, Atsugi 243-01 98, Japan M. Fukuda, M. Suzuki, T. Haga, S . Itabashi and H. Morita NTT System Electronics Laboratories, 31 Morinosato Wakamiya, Atsugi 243-01 98, Japan

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Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)

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