{"title":"金属卡盘对宽带片上测量的影响","authors":"G. Phung, U. Arz","doi":"10.1109/ARFTG52954.2022.9844119","DOIUrl":null,"url":null,"abstract":"On-wafer measurements are essential for the characterization of electronic devices at millimeter-wave frequencies. They have been known as challenging and ambitious containing a lot of parasitic effects. While a lot of investigations have been performed for on-wafer measurements of coplanar waveguides (CPW) placed on ceramic chucks, the parasitic effects related to the influence of metal chucks have not been fully investigated yet. This paper demonstrates a systematic study of the metal chuck in conjunction with the parasitic probe effects using two different probe types in mTRL-calibrated CPW measurements through a thorough field analysis.","PeriodicalId":266876,"journal":{"name":"2022 98th ARFTG Microwave Measurement Conference (ARFTG)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2022-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"On the Influence of Metal Chucks in Wideband On-Wafer Measurements\",\"authors\":\"G. Phung, U. Arz\",\"doi\":\"10.1109/ARFTG52954.2022.9844119\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"On-wafer measurements are essential for the characterization of electronic devices at millimeter-wave frequencies. They have been known as challenging and ambitious containing a lot of parasitic effects. While a lot of investigations have been performed for on-wafer measurements of coplanar waveguides (CPW) placed on ceramic chucks, the parasitic effects related to the influence of metal chucks have not been fully investigated yet. This paper demonstrates a systematic study of the metal chuck in conjunction with the parasitic probe effects using two different probe types in mTRL-calibrated CPW measurements through a thorough field analysis.\",\"PeriodicalId\":266876,\"journal\":{\"name\":\"2022 98th ARFTG Microwave Measurement Conference (ARFTG)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 98th ARFTG Microwave Measurement Conference (ARFTG)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ARFTG52954.2022.9844119\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 98th ARFTG Microwave Measurement Conference (ARFTG)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG52954.2022.9844119","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On the Influence of Metal Chucks in Wideband On-Wafer Measurements
On-wafer measurements are essential for the characterization of electronic devices at millimeter-wave frequencies. They have been known as challenging and ambitious containing a lot of parasitic effects. While a lot of investigations have been performed for on-wafer measurements of coplanar waveguides (CPW) placed on ceramic chucks, the parasitic effects related to the influence of metal chucks have not been fully investigated yet. This paper demonstrates a systematic study of the metal chuck in conjunction with the parasitic probe effects using two different probe types in mTRL-calibrated CPW measurements through a thorough field analysis.
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