基于碳化硅的透明低温探针卡的研制

2022 Intermountain Engineering, Technology and Computing (IETC) Pub Date : 2022-05-01 DOI:10.1109/ietc54973.2022.9796877

Ryan T. Beazer, Jared E. Payne, G. Nielson, Rebecca Anderson, M. Thompson, Topher Johnson, Brad Ferguson, S. Schultz

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引用次数: 0

摘要

本文概述了一种基于碳化硅的低温探针卡，一种用于小电路验证和评估的设备。讨论了紧凑正平面梁和固定固定梁的设计。检查了配套的印刷电路板装置。仿真结果验证了所提设计的可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of a Transparent Cryogenic Probe Card Based on Silicon Carbide

This work provides an overview of a silicon carbide-based cryogenic probe card, a device for small-circuit verification and assessment. Both a compact orthoplanar and a fixed-fixed beam design are discussed. The accompanying printed circuit board device is examined. Simulation results verify the feasibility of the presented designs.

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来源期刊

2022 Intermountain Engineering, Technology and Computing (IETC)

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