实时过程监控[半导体生产线]

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings Pub Date : 1996-11-12 DOI:10.1109/ASMC.1996.558090

R. Bunkofske, N. T. Pascoe, J. Colt, M. W. Smit

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引用次数: 4

摘要

本文讨论了实时过程监控系统(RTPM)在半导体生产线上的数据采集和分析系统的构建、安装和集成。它描述了它如何与现场物流系统、统计过程控制系统和表征数据库集成，以提供改进的过程控制、增加的工具可用性和增强的产量学习。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Real-time process monitoring [semiconductor manufacturing line]

This paper discusses the building, installation and integration of a data acquisition and analysis system in a semiconductor manufacturing line known as the real time process monitoring system (RTPM). It describes how it has been integrated with the site logistics system, the statistical process control system, and the characterization data base to provide improved process control, increased tool availability, and enhanced yield learning.

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来源期刊

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings

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