用于低SWaP MWIR应用的10μm间距XBn探测器的开发

L. Shkedy, M. Brumer, P. Klipstein, M. Nitzani, E. Avnon, Y. Kodriano, I. Lukomsky, I. Shtrichman
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引用次数: 8

摘要

在先进的红外焦平面阵列(FPA)探测器中,缩小像素大小可以减少相同数量的像素,或者增加相同焦平面区域的像素数。更小的间距和更高的像素数使远程监视、高级搜索和跟踪、导弹预警、持续监视和红外光谱等新应用成为可能。在过去的二十年中,SCD一直沿着减小中波红外(MWIR)应用的InSb探测器像素尺寸的道路,开发和制造从30μm到10μm间距的fpa。2013年推出了1920×1536/10μm格式的黑鸟InSb探测器。与传统系统相比,现代光电系统也被设计成更紧凑、低功耗和低成本的解决方案。为了满足这些要求,正在开发在更高工作温度(HOT)下工作的探测器。在过去的几年中,SCD推出了基于新型XBn-InAsSb技术的15μm间距MWIR探测器,该探测器在高达150K的温度下具有出色的电光性能。开发了两种XBn FPA格式,目前正在生产:640×512/15μm和1280×1024/15μm。根据上述趋势,SCD目前正在开发一种10μm XBn像素,设计工作在150K,性能与成熟的15μm像素相似。在本文中,我们介绍了XBn FPA测试设备的结果,其中XBn阵列被倒装键合到一个10μm间距的读出集成电路(ROIC)上。在实验室杜瓦瓶150K下的测试测量表明,暗电流为250fA,量子效率大于70%,像素可操作性高于99.5%,阵列均匀性优异。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of 10μm pitch XBn detector for low SWaP MWIR applications
Shrinking the pixel size in advanced infrared Focal Plane Array (FPA) detectors allows either a reduction in the system size for the same number of pixels, or an increase in the pixel count for the same focal plane area. Smaller pitch and increased pixel count enables new applications such as long range surveillance, advanced Search and Track, missile warning, persistent surveillance, and infrared spectroscopy. In the last two decades SCD has followed this path of reducing the pixel size in InSb detectors for Mid-Wave Infrared (MWIR) applications, developing and manufacturing FPAs from 30μm down to 10μm pitch. The Blackbird InSb detector with 1920×1536/10μm format was introduced in 2013. Modern electro-optical systems are also designed towards a more compact, low power, and lower cost solution compared with traditional systems. In order to meet these requirements, detectors are being developed to work at Higher Operating Temperatures (HOT). In the last few years SCD has introduced 15μm pitch MWIR detectors based on the novel XBn-InAsSb technology, which enables outstanding electro-optical performance at temperatures as high as 150K. Two XBn FPA formats were developed and are now in production: 640×512/15μm and 1280×1024/15μm. Following the above trends, SCD is currently developing a 10μm XBn pixel, designed to operate at 150K with performance similar to the mature 15μm pixel. In this paper we present results from XBn FPA test devices, where the XBn array is flip-chip bonded to a Readout Integrated Circuit (ROIC) with a 10μm pitch. Test measurements in a laboratory Dewar at 150K demonstrate dark currents of 250fA, quantum efficiency greater than 70%, pixel operability of higher than 99.5%, and excellent array uniformity.
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