Sheng-Kai Yeh, Heng-Chung Chang, Chi-En Lu, W. Fang
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引用次数: 4
摘要
本研究提出一种电磁型有源无线CMOS-MEMS触觉传感器的实现方法。施加在传感器上的触觉力会使柔性聚合物发生变形,进而引起刚性钢球的位移。通过驱动线圈感应感应线圈的磁通和电压的变化来测量触觉载荷。所提出的触觉传感器具有四个优点:(1)柔性聚合物填充物作为弹簧,(2)刚性铬钢球作为可移动传感接口(用于加载和引入磁通变化),(3)CMOS芯片作为传感单元,(4)通过提高驱动电压来提高灵敏度。注:不需要悬浮薄膜结构。本设计采用标准的TSM C .18μm CMOS工艺实现。测量结果表明,在5Vpp驱动电压下,触觉传感器的灵敏度为0.53 mv /N,负载范围为0-2.4N。
A CMOS-MEMS Electromagnetic-Type Tactile Sensor with Polymer-Filler and Chrome-Steel Ball Sensing Interface
This study presents the approach to implement an electromagnetic type active wireless CMOS-MEMS tactile sensor. The tactile force applied on sensor will deform the flexible polymer and further cause the displacement of rigid chrome-steel ball. Thus, the magnetic flux and the voltage of sensing coil induced by the driving coil are changed, which are employed to measure the tactile load. The proposed tactile sensor has four merits: (1) flexible polymer filler as spring, (2) rigid chrome-steel ball as movable sensing interface (for loading and introducing magnetic flux change), (3) CMOS chip as sensing unit, and (4) sensitivity is enhanced by increasing the driving voltage. Note: no suspended thin film structures are required. The presented design is implemented by the standard TSM C O.18μm CMOS process. Measurements indicate the sensitivity of tactile sensor (with 5Vpp driving voltage) is O.53mV/N with loading range of 0-2.4N.