K. S. Thakare, S. J. Patil, S. Deshmukh, R. Y. Borse, R. R. Ahire
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Preparation, Characterization and Gas Sensing Performance of Pure SnO2 Thin Films Deposited using Physical Vapour Deposition Technique
Nanocrystalline SnO 2 thin films were successfully prepared using Physical Vapour Deposition technique and were annealed at 400 o C. Structural, morphological, elemental, compositional, optical, and electrical and gas sensing properties were studied using XRD, FESEM, EDXS, UV-Vis Spectrophotometer, DC resistance measurement method respectively. Acetone, Cl 2 , CO 2 , Ethanol, H 2 S and NH 3 sensing performance of Nanocrystalline physically vaporized SnO 2 thin films were investigated and reported in this paper. The results were systematically tabulated, interpreted and discussed.
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