拉伸应变GeSn微磁盘腔中的超低阈值连续波激光

A. Elbaz, Z. Ikonić, F. Boeuf, P. Boucaud, Detlev Grützmacher, D. Buca, M. E. Kurdi, N. V. D. Driesch, K. Pantzas, X. Checoury, Etienne Herth, S. Sauvage, Gilles Patriarche, I. Sagnes, J. Hartmann
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引用次数: 0

摘要

GeSn被证明是在硅上实现cmos兼容激光源的一个很好的候选。该合金的激光显示是基于能带结构的直接性,随着Sn含量增加到8at .%以上,这种直接性增加。因此,近年来的研究主要集中在尽可能高的锡含量上,以实现高直接性和高温激光操作。不幸的是,这导致了阈值的增加。本文讨论了低锡合金与拉伸应变工程相结合的优点。这种方法的动机是在低锡含量下获得更高的材料质量。样品中Sn含量低至5.4 at。% Sn将被讨论。合金最初是压缩应变,并表现出间接带隙,通过施加拉伸应变转变为直接带隙。开发了一种基于在金属上传递绝缘体应力源层的特定技术,以解决应变工程、热冷却和与Ge-VS的缺陷界面。这导致了Ge0.95Sn0.05微盘腔中的激光,与高锡合金的情况相比,阈值大大降低了两个数量级,从而实现了连续波操作。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-Low Threshold CW Lasing in Tensile Strained GeSn Microdisk Cavities
GeSn is proven as a good candidate to achieve CMOS-compatible laser sources on silicon. Lasing demonstrations in this alloy were based on directness of the band structure, this directness being increased with increasing the Sn content above 8 at.%. These past few years the research were consequently focused on incorporating the highest Sn content as possible to achieve high directness and high temperature laser operation. This unfortunately results is increased threshold. In this contribution we discuss the advantages in combining tensile strain engineering with lower Sn content alloys. This approach is motivated by the higher material quality in lower Sn content. The case with Sn content as small as 5.4 at.% Sn will be discussed. The alloy is initially compressively strained, and exhibits an indirect band gap that is turned to direct by applying tensile strain. A specific technology based on transfer On Insulator stressor layer on metal was developed to address strain engineering, thermal cooling and defective interface with the Ge-VS. This led to lasing in Ge0.95Sn0.05 microdisk cavities with dramatically reduced thresholds, by two order of magnitude, as compared to the case with high Sn alloys and as consequence enables cw operation.
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