用于光学互连系统的印刷聚合物光子器件

SPIE OPTO Pub Date : 2016-03-23 DOI:10.1117/12.2213373
H. Subbaraman, Zeyu Pan, Cheng Zhang, Qiaochu Li, L. Guo, Ray T. Chen
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引用次数: 3

摘要

聚合物光子器件的制造通常依赖于洁净室工艺的利用,包括光刻、电子束光刻、反应离子蚀刻(RIE)和提离法等,这些方法价格昂贵,并且仅限于晶圆大小的区域。利用一种新型的可扩展的打印工艺,包括喷墨打印和印迹,我们制造了基于聚合物的光子互连组件,如基于电光聚合物的调制器和环形谐振器开关,以及基于热光聚合物开关的延迟网络,并演示了它们的操作。具体来说,提出了一个工作在15MHz的调制器和一个提供高达35.4ps的2位延迟网络。在本文中,我们还讨论了需要克服的制造挑战,以便使卷对卷制造实际可行。我们讨论了为了实现柔性聚合物光子系统卷对卷制造的真正实施,需要克服的一些制造挑战,如检验和质量控制、注册和卷筒控制。我们已经克服了这些挑战,目前利用我们内部开发的硬件和软件工具,以5m/min的速度展示了<10μm的对准精度。这种可扩展的卷对卷制造方案将能够开发独特的光电器件,可用于无数不同的应用,包括通信,传感,医学,安全,成像,能源,照明等。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Printed polymer photonic devices for optical interconnect systems
Polymer photonic device fabrication usually relies on the utilization of clean-room processes, including photolithography, e-beam lithography, reactive ion etching (RIE) and lift-off methods etc, which are expensive and are limited to areas as large as a wafer. Utilizing a novel and a scalable printing process involving ink-jet printing and imprinting, we have fabricated polymer based photonic interconnect components, such as electro-optic polymer based modulators and ring resonator switches, and thermo-optic polymer switch based delay networks and demonstrated their operation. Specifically, a modulator operating at 15MHz and a 2-bit delay network providing up to 35.4ps are presented. In this paper, we also discuss the manufacturing challenges that need to be overcome in order to make roll-to-roll manufacturing practically viable. We discuss a few manufacturing challenges, such as inspection and quality control, registration, and web control, that need to be overcome in order to realize true implementation of roll-to-roll manufacturing of flexible polymer photonic systems. We have overcome these challenges, and currently utilizing our inhouse developed hardware and software tools, <10μm alignment accuracy at a 5m/min is demonstrated. Such a scalable roll-to-roll manufacturing scheme will enable the development of unique optoelectronic devices which can be used in a myriad of different applications, including communication, sensing, medicine, security, imaging, energy, lighting etc.
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