高性能氮化铝钪MEMS能量采集器，具有晶圆级集成微磁体，用于非接触旋转运动采集

2023 IEEE International Conference on Mechatronics (ICM) Pub Date : 2023-03-15 DOI:10.1109/ICM54990.2023.10101917

T. Dankwort, Minhaz Ahmed, S. Grünzig, Anmol Khare, B. Gojdka

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摘要

本文报道了采用晶圆级集成微磁体和氮化铝钪(AlScN)作为压电换能器层的MEMS能量采集器的性能和长期稳定性。通过磁提取的宽带激励具有超过$85 \mu \ mathm {W}$ RMS的高功率输出。此外，经过1300万次磁拔激后，性能没有明显下降。

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High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting

This article reports on the performance and long-term stability of MEMS energy harvesters with wafer-level integrated micromagnets and aluminum scandium nitride (AlScN) as piezoelectric transducer layer. Broadband excitation via magnetic plucking is demonstrated with high power outputs of more than $85 \mu \mathrm{W}$ RMS. Furthermore, no significant degradation of the performance was observed after 13 million excitation events by magnetic plucking.

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2023 IEEE International Conference on Mechatronics (ICM)

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